ISO INTERNATIONAL STANDARD 14644-14 First edition 2016-09-15 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration Salles propres et environnements maitriseés apparentés- Partie 14: Evaluation de I'aptitude a I'emploi des équipements par la détermination de la concentration de particules en suspension dans l'air Reference number IS0 14644-14:2016(E) ISO @ IS0 2016 IS0 14644-14:2016(E) COPYRIGHTPROTECTEDDOCUMENT @IS0 2016, Published in Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Ch. de Blandonnet 8 . CP 401 CH-1214 Vernier, Geneva, Switzerland Tel. +41 22 749 01 11 Fax +4122749 09 47 copyright@iso.org www.iso.org ii @ IS0 2016 - All rights reserved IS0 14644-14:2016(E) Contents Page Foreword ..iv Introduction ..V 1 Scope. 2 Normative references ..1 3 Terms and definitions. ..1 4 General outline of the assessment .3 5 Visual inspection .3 6 Assessment of suitability by airborne particle concentration measurements .4 6.1 General .4 6.2 Assessment procedure 4 6.2.1 Overview .4 6.2.2 Requirements and considerations .5 6.2.3 Representative mode of operation .6 6.2.4 Considerations for the test environment .6 6.2.5 Determination of the test environment .6 6.2.6 Approximate identification of HPC location(s) .6 6.2.7 Precise determination of HPC location(s) 7 6.2.8 Suitability measurement(s) .7 6.2.9 Data processing .8 6.2.10 Referenceto Is0 14644-1classification system .10 7 Documentation .10 7.1 General 10 7.2 Common documentation requirements .10 7.3 Documentation for visual inspection .11 7.4 Documentation forassessmentoftestenvironment .11 7.5 Documentation for classification measurement. ..12 8 Statement on cleanroom suitability .12 Annex A (informative) Example for data processing deriving from measurements ..14 Annex B (informative) Additional optional tests .18 Bibliography .21 @ IS0 2016 - All rights reserved iii