论文标题
高灵敏度磁场传感器通过三明治型PDMS谐振器
High sensitivity magnetic field sensor via sandwich type PDMS resonator
论文作者
论文摘要
提出了针对具有高灵敏度的单轴磁传感器的夹层结构作为PDMS谐振器的核心层。小杨的柔性材料模量对应于较大的变化,从而产生了高度敏感的磁反应。三明治结构预设磁场提供了方向传感特征。实验结果表明,在未屏蔽的环境中,红移灵敏度为1.08 nm/mt,蓝光敏感性为1.12 nm/mt,这归因于PDMS Young的模量的略有变化。在1.4 kHz时,实现了0.96 nt Hz-1/2的最小可检测磁场。
The sandwich structure as the core layer of PDMS resonator is proposed for single-axis magnetic sensor with high sensitivity. The small Young's modulus of flexible material corresponds to larger variation, resulting in a highly sensitive magnetic response. The sandwich structure pre-set magnetic field provides directional sensing feature. The experimental results show that the redshift sensitivity of 1.08 nm/mT and the blueshift sensitivity of 1.12 nm/mT in the unshielded environment, which is attributed to slight variation in PDMS Young's modulus. At 1.4 kHz, a minimum detectable magnetic field of 0.96 nT Hz-1/2 is realized.