开发LGAD传感器，带有薄入口窗口，用于软X射线检测

论文标题

开发LGAD传感器，带有薄入口窗口，用于软X射线检测

Development of LGAD sensors with a thin entrance window for soft X-ray detection

论文作者

Zhang, Jiaguo, Barten, Rebecca, Baruffaldi, Filippo, Bergamaschi, Anna, Borghi, Giacomo, Boscardin, Maurizio, Brueckner, Martin, Carulla, Maria, Vignali, Matteo Centis, Dinapoli, Roberto, Ebner, Simon, Ficorella, Francesco, Froejdh, Erik, Greiffenberg, Dominic, Ali, Omar Hammad, Heymes, Julian, Hasanaj, Shqipe, Hinger, Viktoria, King, Thomas, Kozlowski, Pawel, Lopez-Cuenca, Carlos, Mezza, Davide, Moustakas, Konstantinos, Mozzanica, Aldo, Paternoster, Giovanni, Ronchin, Sabina, Ruder, Christian, Schmitt, Bernd, Thattil, Dhanya

论文摘要

我们展示了为改进硅传感器技术而进行的开发，用于使用混合X射线探测器检测软X射线。需要优化入口窗口技术以提高量子效率。 LGAD技术可用于扩增X射线产生的信号并增加信号噪声比率，从而使软X射线能量范围内的单个光子分辨率成为可能。在本文中，我们报告了从LGAD传感器生产中获得的首次结果，并具有优化的薄入口窗口。从测量值中证明了对软X射线的单光子检测至452〜EV，其信噪比优于20。

We show the developments carried out to improve the silicon sensor technology for the detection of soft X-rays with hybrid X-ray detectors. An optimization of the entrance window technology is required to improve the quantum efficiency. The LGAD technology can be used to amplify the signal generated by the X-rays and to increase the signal-to-noise ratio, making single photon resolution in the soft X-ray energy range possible. In this paper, we report first results obtained from an LGAD sensor production with an optimized thin entrance window. Single photon detection of soft X-rays down to 452~eV has been demonstrated from measurements, with a signal-to-noise ratio better than 20.

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