学术文献库

An inertial sensor design is proposed in this paper to achieve high sensitivity and large dynamic range in the sub-Hz frequency regime. High acceleration sensitivity is obtained by combining optical cavity readout systems with monolithically fabricated mechanical resonators. A high-sensitivity heterodyne interferometer simultaneously monitors the test mass with an extensive dynamic range for low-stiffness resonators. The bandwidth is tuned by optical feedback cooling to the test mass via radiation pressure interaction using an intensity-modulated laser. The transfer gain of the feedback system is analyzed to optimize system parameters towards the minimum cooling temperature that can be achieved. To practically implement the inertial sensor, we propose a cascaded cooling mechanism to improve cooling efficiency while operating at low optical power levels. The overall system layout presents an integrated design that is compact and lightweight.