论文标题
背面照明的自由膜类型的频率响应分析
Frequency Response Analysis of Backside Illuminated Free-Membrane Type IR Superconducting Bolometer
论文作者
论文摘要
在自由膜构型中的背面照明型Yttrium型钡氧化铜（YBCO）过渡边缘（TEB）的IR响应进行了测量和分析。该分析基于考虑到设备的所有热参数的重测结构的综合等效电路模型。使用450nm的超导YBCO薄膜制成检测器，该薄膜在约100 um厚的晶体SRTIO3（STO）底物上使用优化的低成本金属有机沉积（MOD）技术制成。背面照明结构为润仪的背面自由利用不同的IR吸收材料和结构提供了基础，以便为该设备获得宽带高辐射吸收系数，同时还避免了吸收层在YBCO薄膜特性上沉积的负面影响。还将获得背面照明的钢计的分析和实验结果与先前报道的前侧照明冲线机的结果进行了比较。
The IR response of a backside illuminated type Yttrium Barium Copper Oxide (YBCO) transition-edge bolometer (TEB) in a free-membrane configuration is measured and analyzed. The analysis is based on a comprehensive equivalent circuit model for the bolometer structure considering all the thermal parameters of the device. The detector is made using a 450nm superconductive YBCO thin film grown on about 100 um thick crystalline SrTiO3 (STO) substrate using an optimized low cost Metal Organic Deposition (MOD) technique. The backside illuminated structure provided a basis for freely utilizing different IR absorber materials and structures on the backside of the bolometer in order to get wide band high radiation absorption coefficient for the device, while also avoiding any negative effect of the deposition of the absorber layer on the YBCO thin film properties. The obtained analytical and experimental results for the backside illuminated bolometer were also compared with the results of the previously reported front-side illuminated bolometers.
