论文标题
传输矩阵定量相位术，用于准确和快速厚度的2D材料的映射
Transmission-matrix Quantitative Phase Profilometry for Accurate and Fast Thickness Mapping of 2D Materials
论文作者
论文摘要
二维（2D）材料的物理特性可能随厚度曲线的巨大变化。 2D材料的当前厚度分析方法（例如，原子力显微镜和椭圆法）在测量吞吐量和准确性方面受到限制。在这里，我们提出了一种新型的高速和高精度厚度分析方法，称为透射 - 矩阵定量相验证仪（TM-QPP）。在TM-QPP中，通过扩展高灵敏度公共路径干涉显微镜技术的光子射击量极限来实现生态级级光路途径敏感性，而通过开发透射式matrix模型来实现准确的厚度测定，该模型可以说明在样品界面上的多个折射和光反射。使用TM-QPP，单层和几层2D材料（例如MOS2，MOSE2和WSE2）的精确厚度曲线在以无接触方式的方式内绘制在几秒钟内的广阔视野上。值得注意的是，TM-QPP还能够在空间上解决几层二维材料的层数。
The physical properties of two-dimensional (2D) materials may drastically vary with their thickness profiles. Current thickness profiling methods for 2D material (e.g., atomic force microscopy and ellipsometry) are limited in measurement throughput and accuracy. Here we present a novel high-speed and high-precision thickness profiling method, termed Transmission-Matrix Quantitative Phase Profilometry (TM-QPP). In TM-QPP, picometer-level optical pathlength sensitivity is enabled by extending the photon shot-noise limit of a high sensitivity common-path interferometric microscopy technique, while accurate thickness determination is realized by developing a transmission-matrix model that accounts for multiple refractions and reflections of light at sample interfaces. Using TM-QPP, the exact thickness profiles of monolayer and few-layered 2D materials (e.g., MoS2, MoSe2 and WSe2) are mapped over a wide field of view within seconds in a contact-free manner. Notably, TM-QPP is also capable of spatially resolving the number of layers of few-layered 2D materials.
