论文标题
正交期干涉法的谐波校准
Harmonic calibration of quadrature phase interferometry
论文作者
论文摘要
正交相干涉仪的两个输出信号允许从干涉仪（在边缘内部工作）和扩展输入范围（计数条纹）的高灵敏度受益。传统上，使用Heydemann的校正，他们的校准达到线性输出，这涉及将一个输出与另一个输出拟合。在这里，我们基于测量对正弦输入的线性响应的线性响应提出了两种替代方法，从而实现了具有出色线性的直接校准。在测量扫描力显微镜悬臂的偏转的光学干涉仪上，证明了相对于常规技术的十倍改进。
The two output signals of quadrature phase interferometers allow to benefit both from the high sensitivity of interferometry (working inside a fringe) and from an extended input range (counting fringes). Their calibration to reach a linear output is traditionally performed using Heydemann's correction, which involves fitting one output versus the other by an ellipse. Here we present two alternative methods based on the linear response of the measurement to a sinusoidal input in time, which enables a direct calibration with an excellent linearity. A ten fold improvement with respect to the usual technique is demonstrated on an optical interferometer measuring the deflection of scanning force microscopy cantilevers.
