论文标题
激光诱导的氧化铜薄膜结晶:高斯和人字形梁曲线之间进行的比较为高斯梁曲线故障提供了线索
Laser-induced crystallization of copper oxide thin films: A comparison made between Gaussian and chevron-beam profiles provides a clue for the failure of Gaussian-beam profile
论文作者
论文摘要
在尝试结晶非晶状薄膜的尝试中,经常采用激光与高斯束轮廓的使用。但是,它仅导致形成多晶薄膜。在本文中,描述了非晶状铜(II)氧化物(CUO)的选择性区域结晶。结晶是由激光,激光诱导的结晶诱导的,其梁曲线的形状为字形。通过展示了从非晶状体相的过渡,该相位由小100 nm x 100 nm的CuO到铜(I)氧化物(CU2O)的单一晶相。通过电子背部散射衍射和拉曼光谱法鉴定了该过渡,这清楚地表明,Cu2O的单晶结构域的大小高达5μmx 1 mm。如果这些实验发现,则开发了基于细胞自动机模型的理论评估,具有局部重结晶和随机成核的行为。理论评估可以定性地描述激光诱导的结晶中可观察到的重要特征(例如晶粒的大小和总几何形状)的激光束几何依赖性。理论评估预测,产生的结晶度(单晶或多晶)的差异主要取决于几何曲线,沿激光扫描方向进行非单个晶状体区域的熔化。凹进拖车的轮廓产生较大的晶粒,导致单晶的同时触发式轨道剖面会导致较小的晶粒,从而导致多晶体,对基本问题产生了启示,为什么雪佛龙束轮廓为何在高斯光束剖面而产生单晶体时会成功产生单晶型。
The use of laser with a Gaussian-beam profile is frequently adopted in attempts of crystallizing non-single-crystal thin films; however, it merely results in the formation of poly-crystal thin films. In this paper, selective area crystallization of non-single-crystal copper(II) oxide (CuO) is described. The crystallization is induced by laser, laser-induced crystallization, with a beam profile in the shape of chevron. The crystallization is verified by the exhibition of a transition from a non-single-crystal phase consisting of small 100 nm x 100 nm grains of CuO to a single-crystal phase of copper(I) oxide (Cu2O). The transition is identified by electron back scattering diffraction and Raman spectroscopy, which clearly suggests that a single-crystal domain of Cu2O with size as large as 5 μm x 1 mm develops. Provided these experimental findings, a theoretical assessment based on a cellular automaton model, with the behaviors of localized recrystallization and stochastic nucleation, is developed. The theoretical assessment can qualitatively describe the laser beam geometry-dependence of vital observable features (e.g., size and gross geometry of grains) in the laser-induced crystallization. The theoretical assessment predicts that differences in resulting crystallinity, either single-crystal or poly-crystal, primarily depend on a geometrical profile with which melting of non-single-crystal regions takes place along the laser scan direction; concave-trailing profiles yield larger grains which lead to single-crystal while convex-trailing profiles results in smaller grains which lead to poly-crystal, casting light on the fundamental question Why does a chevron-beam profile succeed in producing single-crystal while a Gaussian-beam profile fails?