论文标题
使用能量置换景观的铁电负电容杂交元件执行器分析
Analysis of Ferroelectric Negative Capacitance-Hybrid MEMS Actuator Using Energy-Displacement Landscape
论文作者
论文摘要
我们提出了一个基于能量的框架，以分析铁电容性杂种杂种微机械系统（MEMS）执行器的静电和动力学。将铁电的电荷与可移动电极的位移相关联的映射函数，用于以位移来获得杂种致动器的哈密顿量。然后，我们使用图形能量置换和相肖像图来分析混合执行器的静态引进，动态引进和拉出现象。使用这些，我们说明了与独立的MEMS执行器相比，混合执行器对静态和步骤输入的低压操作。获得的结果与分析预测和数值模拟一致。所提出的框架可以直接纳入接触表面之间的粘附，以范德华力进行建模。我们表明，由于粘附而降低电压不影响拉入电压。所提出的框架提供了一种基于物理的工具来设计和分析基于负电容的低压MEMS执行器。
We propose an energy-based framework to analyze the statics and dynamics of a ferroelectric negative capacitance-hybrid Microelectromechanical System (MEMS) actuator. A mapping function that relates the charge on the ferroelectric to displacement of the movable electrode, is used to obtain the Hamiltonian of the hybrid actuator in terms of displacement. We then use graphical energy-displacement and phase portrait plots to analyze static pull-in, dynamic pull-in and pull-out phenomena of the hybrid actuator. Using these, we illustrate the low-voltage operation of the hybrid actuator to static and step inputs, as compared to the standalone MEMS actuator. The results obtained are in agreement with the analytical predictions and numerical simulations. The proposed framework enables straightforward inclusion of adhesion between the contacting surfaces, modeled using van der Waals force. We show that the pull-in voltage is not affected, while the pull-out voltage is reduced due to adhesion. The proposed framework provides a physics-based tool to design and analyze negative capacitance based low-voltage MEMS actuators.
