论文标题
杰斐逊实验室的超导腔的原位血浆处理
In Situ Plasma Processing of Superconducting Cavities at Jefferson Lab
论文作者
论文摘要
杰斐逊实验室（Jefferson Lab）于2019年春季开始了一个血浆处理程序开始。等离子体加工是从表面上去除碳氢化合物的常见技术，从表面上增加了碳氢化合物，从而增加了工作功能并降低了SEC-强度排放系数。与依赖于场发射器的离子轰击的氦加工不同，血浆加工使用血浆中产生的游离氧气来分解腔表面上的碳氢化合物。作为工艺气体流量的一部分，以水，一氧化碳和二氧化碳的形式以水，一氧化碳和二氧化碳的形式进行残留物。这项工作的最初重点是通过将RF功率注入HOM耦合器端口来处理C100腔。然后，我们将通过将RF引入基本功率耦合器来开始调查C50腔的处理。该计划是在中期的未来开始处理Cebaf隧道中的冷冻模块，以改善Linacs的运营梯度和能量。这项工作将描述JLAB在使用氩气混合物加工腔的系统和方法。还将提出等离子体亲保留结果之前和之后的结果。
Jefferson Lab began a plasma processing program start-ing in the spring of 2019. Plasma processing is a common technique for removing hydrocarbons from surfaces, which increases the work function and reduces the sec-ondary emission coefficient. Unlike helium processing which relies on ion bombardment of the field emitters, plasma processing uses free oxygen produced in the plasma to break down the hydrocarbons on the surface of the cavity. The residuals of the hydrocarbons in the form of water, carbon monoxide and carbon dioxide are re-moved from the cryomodule as part of the process gas flow. The initial focus of the effort is processing C100 cavities by injecting RF power into the HOM coupler ports. We will then start investigating processing of C50 cavities by introducing RF into the fundamental power coupler. The plan is to start processing cryomodules in the CEBAF tunnel in the mid-term future, with a goal of improving the operational gradients and the energy mar-gin of the linacs. This work will describe the systems and methods used at JLAB for processing cavities using an argon oxygen gas mixture. Before and after plasma pro-cessing results will also be presented.
