论文标题

部分可观测时空混沌系统的无模型预测

Micro-fabricated mirrors with finesse exceeding one million

论文作者

Jin, Naijun, McLemore, Charles A., Mason, David, Hendrie, James P., Luo, Yizhi, Kelleher, Megan L., Kharel, Prashanta, Quinlan, Franklyn, Diddams, Scott A., Rakich, Peter T.

论文摘要

Fabry-Pérot谐振器是使用最广泛的光学设备之一,可以在包括腔QED,光学时钟,精度长度计量学和光谱的各个领域的科学和技术突破。尽管谐振器设计差异很大,但所有高端应用都受益于最低损失和最高技巧的镜子。最高技巧反射的制造依赖于数百年的机械抛光技术,这些技术在每百万(ppm)水平上提供损失。但是,没有现有的制造技术能够产生高技巧的谐振器,具有可伸缩量子设备和下一代紧凑型原子钟所需的大量镜面几何形状。在本文中,我们介绍了一种新的可扩展方法,以使用超高技巧($ \ geq 10^{6} $)制造镜子,用户定义的曲率半径跨越四个数量级($ 10^{ - 4} -10} -10^{0} {0} $ M)。我们采用光晶器反流和反应性离子蚀刻来形成和将镜模板转移到基板上,同时保持子角度粗糙度。该基材涂有一个介电堆栈,用于创建一系列紧凑的Fabry-Pérot谐振器,其精细值高达130万,并测量了多余的损失$ <$ 1 ppm。在5个底物上进行43个设备的43个设备的光学响应测量表明,弯曲的小半径和较大的半径均可产生平均涂层有限的限制性技巧,为105万。这种多功能的新方法为新兴量子光学和频率计量技术所需的高素质小型Fabry-pérot腔提供了可扩展的小型化Fabry-Pérot腔。

The Fabry-Pérot resonator is one of the most widely used optical devices, enabling scientific and technological breakthroughs in diverse fields including cavity QED, optical clocks, precision length metrology and spectroscopy. Though resonator designs vary widely, all high-end applications benefit from mirrors with the lowest loss and highest finesse possible. Fabrication of the highest finesse mirrors relies on centuries-old mechanical polishing techniques, which offer losses at the part-per-million (ppm) level. However, no existing fabrication techniques are able to produce high finesse resonators with the large range of mirror geometries needed for scalable quantum devices and next-generation compact atomic clocks. In this paper, we introduce a new and scalable approach to fabricate mirrors with ultrahigh finesse ($\geq 10^{6}$) and user-defined radius of curvature spanning four orders of magnitude ($10^{-4}-10^{0}$ m). We employ photoresist reflow and reactive ion etching to shape and transfer mirror templates onto a substrate while maintaining sub-Angstrom roughness. This substrate is coated with a dielectric stack and used to create arrays of compact Fabry-Pérot resonators with finesse values as high as 1.3 million and measured excess loss $<$ 1 ppm. Optical ringdown measurements of 43 devices across 5 substrates reveal that the fabricated cavity mirrors -- with both small and large radii of curvature -- produce an average coating-limited finesse of 1.05 million. This versatile new approach opens the door to scalable fabrication of high-finesse miniaturized Fabry-Pérot cavities needed for emerging quantum optics and frequency metrology technologies.

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