论文标题
超导硼掺杂的纳米晶钻石微波炉共面谐振器
Superconducting boron doped nanocrystalline diamond microwave coplanar resonator
论文作者
论文摘要
提出了一个超导硼掺杂的纳米晶钻石（B-NCD）Coplanar波导谐振器（CPR）用于动力学电感（$ l_k $）和渗透深度（$λ_{\λ_{\ rm {lm {l}} $）在Microtodivale频率上进行了0.4的介于0.4 gh Z gh Z g.2 gh。 CPR方法，这项工作表明，Si上的薄细粒b-ncd胶片（$ t \ $ 500 nm）具有较大的渗透深度（$λ_ {\ rm {lm {lm {l}} \约4.3 $ 4.3 $ 4.4 $μ$ m），因此，相关的高动力（$ l_ $ l _ $ l_ { pH/$ \ square $）。这些值比通常在单晶钻石上获得的膜获得的值要大得多，这可能是由于纳米晶膜的显着粒度引起的。基于结构的测得的Q因子，发现该频率范围内计算出的表面电阻在$ t <2 $ K时低至$ \ $ \ $ \ $ 2至4 $μω$，这表明了粒状B-NCD的潜力，用于高质量因子超导型微波谐振器和高度敏感的动力学感应者。
A superconducting boron doped nanocrystalline diamond (B-NCD) coplanar waveguide resonator (CPR) is presented for kinetic inductance ($L_k$) and penetration depth ($λ_{\rm{L}}$) measurements at microwave frequencies of 0.4 to 1.2 GHz and at temperatures below 3 K. Using a simplified effective medium CPR approach, this work demonstrates that thin granular B-NCD films ($t\approx $ 500 nm) on Si have a large penetration depth ($λ_{\rm{L}}\approx 4.3$ to 4.4 $μ$m), and therefore an associated high kinetic inductance ($L_{k,\square} \approx $ 670 to 690 pH/$\square$). These values are much larger than those typically obtained for films on single crystal diamond which is likely due to the significant granularity of the nanocrystalline films. Based on the measured Q factors of the structure, the calculated surface resistance in this frequency range is found to be as low as $\approx$ 2 to 4 $μΩ$ at $T<2$ K, demonstrating the potential for granular B-NCD for high quality factor superconducting microwave resonators and highly sensitive kinetic inductance detectors.
