论文标题
液体硅中凹形SIC {0001}表面的结构和形态演变
Structure and morphology evolution of concave-shaped SiC {0001} surfaces in liquid silicon
论文作者
论文摘要
在纯液体硅中制备并重建了凹形的4H-SIC {0001}表面，以研究SIC表面的结构和形态演变，这是方位角和离轴角度的函数。在两个极地表面上揭示了不同的表面特征，其中只有Si面反映了4H-SIC晶体的六倍对称性。在Si面上，沿<1100>方向的台阶束要比<1120>方向强，这与阶梯边缘处的粘结状态有关。在C面上观察到更明显的步骤束，而对方位角则不敏感。 Si面上的台阶范围更强。步骤方面与SIC {0001}表面的两个极性上的关节角度无关。
Concave-shaped 4H-SiC {0001} surfaces have been prepared and reconstructed in pure liquid silicon for investigating the structure and morphology evolution of the SiC surface as a function of both azimuthal and off-axis angles. Different surface characteristics are revealed on two polar surfaces where only the Si face reflects the six-fold symmetry of 4H-SiC crystal. On the Si face, the step bunching along the <1100> direction is stronger than the <1120> direction, which is related to the bonding state at the step edge. More significant step bunching is observed on the C face whereas it is not sensitive to azimuthal orientation. The extent of step faceting is stronger on the Si face. The step faceting is independent of the off angle on both polarities of SiC {0001} surfaces.
