论文标题
调节vanscente波对薄膜生长的影响
Modulating Effect of Evanscent Waves on Thin Film Growth
论文作者
论文摘要
原子级平滑薄膜是成功集成和许多多层结构设备的正确功能的关键。然而，内在的岛状生长模式阻止了人类意识到许多重要功能材料的超齿膜。为了解决这个问题，我们提出了一种负面熵的方法，该方法采用evanscent浪潮来增强Adatoms的向下层间扩散，从而将类似岛状的生长模式转化为逐层生长模式。得出了光学力和降低的扩散屏障的公式，并且该理论在简化的示例中的应用表明，通过数值模拟证明了表面形态的显着改善。
Atomic-scale smooth thin films are keys to successful integration and proper function of many multilayer-structured devices. However, the intrinsic island-like growth mode prevents human being from realizing such ultrasmooth films of many important functional materials. To solve this problem, we propose a negative entropy-infusing method that employs evanescent waves to enhance the downward interlayer diffusion of adatoms and thus transform the island-like growth mode to the layer-by-layer growth mode. The formulas of the optical force and the lowered diffusion barrier were derived, and the application of this theory on a simplified example demonstrates significantly improved surface morphologies through numerical simulations.
