论文标题

无介电泄漏和界面捕获的电荷的金属 - 有线界限金属电容器中无滞后负电容效应的物理机制

Physical Mechanism behind the Hysteresis-free Negative Capacitance Effect in Metal-Ferroelectric-Insulator-Metal Capacitors with Dielectric Leakage and Interfacial Trapped Charges

论文作者

Hsu, Chia-Sheng, Chang, Sou-Chi, Nikonov, Dmitri E., Young, Ian A., Naeemi, Azad

论文摘要

铁电(FE)材料的负电容(NC)稳定可以提供进一步降低超级设备中功耗的替代方法,因此在过去十年中对技术和科学一直具有极大的兴趣。在本文中,我们介绍了物理图片,以更好地理解在金属 - 有线 - 隔离剂 - 金属(MFIM)电容器中实验观察到的无滞后电荷提升效应。通过引入介电(DE)泄漏和界面捕获的电荷,我们对磁滞回路的模拟与实验测量非常吻合,这表明在金属界面中存在界面氧化物层,在金属界面中的界面氧化物层中存在。基于脉冲开关测量值,我们发现电荷增强和磁滞分别由FE域粘度和DE泄漏支配。我们的仿真结果表明,观察到的无滞后电荷增强的基本机制在物理上可能与所谓的NC稳定和电容匹配。此外,讨论了Merz定律与现象学动力学系数之间的联系,并通过FE-DE界面处的被困的电荷动力学来解释脉冲切换后观察到的残留电荷的可能原因。这项工作中提出的物理解释可以为MFIM电容器中的NC效应以及对低功率逻辑设备的未来研究提供重要的见解。

The negative capacitance (NC) stabilization of a ferroelectric (FE) material can potentially provide an alternative way to further reduce the power consumption in ultra-scaled devices and thus has been of great interest in technology and science in the past decade. In this article, we present a physical picture for a better understanding of the hysteresis-free charge boost effect observed experimentally in metal-ferroelectric-insulator-metal (MFIM) capacitors. By introducing the dielectric (DE) leakage and interfacial trapped charges, our simulations of the hysteresis loops are in a strong agreement with the experimental measurements, suggesting the existence of an interfacial oxide layer at the FE-metal interface in metal-ferroelectric-metal (MFM) capacitors. Based on the pulse switching measurements, we find that the charge enhancement and hysteresis are dominated by the FE domain viscosity and DE leakage, respectively. Our simulation results show that the underlying mechanisms for the observed hysteresis-free charge enhancement in MFIM may be physically different from the alleged NC stabilization and capacitance matching. Moreover, the link between Merz's law and the phenomenological kinetic coefficient is discussed, and the possible cause of the residual charges observed after pulse switching is explained by the trapped charge dynamics at the FE-DE interface. The physical interpretation presented in this work can provide important insights into the NC effect in MFIM capacitors and future studies of low-power logic devices.

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