论文标题
用Aln-phin-film-Transducer制造，表征和模拟玻璃设备，以激发超声共振
Fabrication, characterization, and simulation of glass devices with AlN-thin-film-transducers for excitation of ultrasound resonances
论文作者
论文摘要
我们介绍了570-Um-Thick，毫米大小的苏打石灰 - 硅酸盐玻璃玻璃块，其中具有1厚的Aln-thin-Film压电传感器，这些透射剂夹在薄金属电极之间，沉积在顶部表面上。电力机械性能的特征是频率范围为0.1至10 MHz的电阻抗测量值，峰值峰值电压为0.5 V，应用于电极。我们测量了35个设备的电阻抗光谱，所有宽度为2 mm，但9个不同的长度范围为2至6 mm，并且每个几何形状的2-7副本。每个阻抗光谱都表现出许多共振峰，我们仔细测量了每个光谱中5个最突出的峰。我们将产生的173个实验共振频率与我们开发的有限元素模型的模拟结果进行了比较。当使用制造商的材料参数时，我们获得了173个模拟共振频率与（-4.2 +/- 0.04）％的平均相对偏差。当优化模拟中的年轻模量值和浮子玻璃的泊松比时，该相对偏差降至（-0.03 +/- 0.04）％。我们的结果提出了一种方法，可以在任何弹性固体的超声频率下准确地确定声学参数
We present fabrication of 570-um-thick, millimeter-sized soda-lime-silicate float glass blocks with a 1-um-thick AlN-thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The electro-mechanical properties are characterized by electrical impedance measurements in the frequency range from 0.1 to 10 MHz with a peak-to-peak voltage of 0.5 V applied to the electrodes. We measured the electrical impedance spectra of 35 devices, all of width 2 mm, but with 9 different lengths ranging from 2 to 6 mm and with 2-7 copies of each individual geometry. Each impedance spectrum exhibits many resonance peaks, of which we carefully measured the 5 most prominent ones in each spectrum. We compare the resulting 173 experimental resonance frequencies with the simulation result of a finite-element-method model that we have developed. When using material parameters from the manufacturer, we obtain an average relative deviation of the 173 simulated resonance frequencies from the experimental ones of (-4.2 +/-0.04)%. When optimizing the values of the Young's modulus and the Poisson ratio of the float glass in the simulation, this relative deviation decreased to (-0.03 +/- 0.04)%. Our results suggest a method for an accurate in-situ determination of the acoustic parameters at ultrasound frequencies of any elastic solid onto which a thin-film transducer can be attached
