论文标题
外延紧张的菱形ZRO2薄膜中的铁电性
Ferroelectricity in epitaxially strained rhombohedral ZrO2 thin films
论文作者
论文摘要
锆基和基于Hafnia的薄膜在过去的十年中引起了极大的关注,因为它们在纳米级的意外铁电行为,这有助于降低铁电装置的缩放。本工作报告了ZRO2的新型铁电菱形相,可以在(111)-nb上生长的薄膜中实现,通过离子梁溅射。结构和铁电特征表明,面向(111)的ZRO2膜处于外在压缩应变下,并显示约20.2μC/cm2的可切换铁电化极化,其胁迫场为1.5 mV/cm。此外,NB:Sto/Zro2/au膜电容器的时间依赖性极化逆转特征表现出钟形曲线,这是与域逆转相关的铁电膜的典型特征。估计的激活场与从极化 - 电场磁滞回路获得的强制场相媲美。有趣的是,所研究的膜本身显示了铁电行为,即,无需应用唤醒周期,这对于在Zro2的常规(正骨)铁电相中诱导铁电性至关重要。因此,当前的膜比先前研究的铁电ZRO2膜具有技术优势,并且可能对纳米级铁电设备有吸引力。
Zirconia and hafnia based thin films have attracted tremendous attention in the last decade due to their unexpected ferroelectric behavior at the nanoscale, which facilitates the downscaling of ferroelectric devices. The present work reports a novel ferroelectric rhombohedral phase of ZrO2 that can be achieved in thin films grown on (111)- Nb:SrTiO3 substrates by ion-beam sputtering. Structural and ferroelectric characterizations reveal that the (111)-oriented ZrO2 films are under epitaxial compressive strain and display a switchable ferroelectric polarization of about 20.2 μC/cm2 with a coercive field of 1.5 MV/cm. Moreover, the time dependent polarization reversal characteristics of Nb:STO/ZrO2/Au film capacitors exhibit bell-shape curves, a typical feature of ferroelectric films associated with domains reversal. The estimated activation field is comparable to the coercive field obtained from polarization-electric field hysteresis loops. Interestingly, the studied films show ferroelectric behavior per se, i.e., there is no need to apply the wake-up cycle that is essential to induce ferroelectricity in the conventional (orthorhombic) ferroelectric phase of ZrO2. Therefore, the present films have a technologically advantage over the previously studied ferroelectric ZrO2 films, and may be attractive for nanoscale ferroelectric devices.