论文标题
用于重力波干涉仪镜的基于触红色的氧化物膜中的氩气泡形成
Argon bubble formation in tantalum oxide-based films for gravitational wave interferometer mirrors
论文作者
论文摘要
使用HAADF图像和双键以空间分辨的方式对二氧化钛掺杂型五氧化氧化二氧化物薄膜的氩含量进行了定量。研究了以300 $^{\ circ} $ c退火的胶片，400 $^{\ circ} $ c和600 $^{\ circ} $ c，以查看退火温度与泡泡形成之间是否存在关系。使用HAADF成像表明，大多数这些电影中都存在氩气，并且在400 $^{\ circ} $ c退火后开始形成氩气的气泡，并在600 $^{\ circ} $ c退火后发出了coarsen。使用来自鳗鱼地图集的Argon数据和使用Hartree Slater横截面缩放的实验数据创建了半经验标准。在600 $^{\ circ} $ c样品中计算了35个气泡的气泡中氩气的密度和压力。气泡的平均直径，密度和压力分别为22Å，870kg/m $^3 $和400mpa。使用范德华方程计算压力。气泡可能会影响膜的特性，该膜被用作重力波检测器中镜子的光学涂层。这种空间分辨的定量技术可以很容易地应用于一系列材料中的其他小贵重气泡。
The argon content of titanium dioxide doped tantalum pentoxide thin films was quantified in a spatially resolved way using HAADF images and DualEELS. Films annealed at 300$^{\circ}$C, 400$^{\circ}$C and 600$^{\circ}$C were investigated to see if there was a relationship between annealing temperature and bubble formation. It was shown using HAADF imaging that argon is present in most of these films and that bubbles of argon start to form after annealing at 400$^{\circ}$C and coarsen after annealing at 600$^{\circ}$C. A semi-empirical standard was created for the quantification using argon data from the EELS atlas and experimental data scaled using a Hartree Slater cross section. The density and pressure of argon within the bubbles was calculated for 35 bubbles in the 600$^{\circ}$C sample. The bubbles had a mean diameter, density and pressure of 22Å, 870kg/m$^3$ and 400MPa, respectively. The pressure was calculated using the Van der Waals equation. The bubbles may affect the properties of the films, which are used as optical coatings for mirrors in gravitational wave detectors. This spatially resolved quantification technique can be readily applied to other small noble gas bubbles in a range of materials.
