论文标题
过渡金属二甲藻元素单层的外延单晶生长通过原子锯齿表面
Epitaxial single-crystal growth of transition metal dichalcogenide monolayers via atomic sawtooth Au surface
论文作者
论文摘要
高度希望二维范德华分层单晶(SC)膜的生长表现出用于工业应用的内在材料科学和前所未有的设备。虽然晶体尺度的SC六角硼氮化脂膜已成功地生长,但迄今为止尚未确定硅藻过渡金属二甲化合物(TMDC)膜的理想增长平台。在这里,我们将TMDC单层的SC生长通过原子锯黄金表面作为通用生长模板,以厘米的比例为厘米。原子牙齿 - 海绵表面是通过液态金的一步固化来构建的,这是通过传输 - 电子显微镜证明的。通过密度功能计算证实的TMDC簇的各向异性吸附能在周期性的原子步骤边缘占上风,以产生三角形TMDC晶粒的单向外延生长,最终形成SC膜,无论Miller指数无论如何。用于几种TMDC单层膜,包括WS2,WSE2,MOS2,MOSE2/WSE2异质结构和W1-XMOXS2合金,证明了使用原子锯黄色表面作为通用生长模板的生长。我们的策略为晶圆量表的硅藻范德华异质结构的SC增长提供了一般途径,以进一步促进TMDC在硅后技术中的应用。
Growth of two-dimensional van der Waals layered single-crystal (SC) films is highly desired to manifest intrinsic material sciences and unprecedented devices for industrial applications. While wafer-scale SC hexagonal boron nitride film has been successfully grown, an ideal growth platform for diatomic transition metal dichalcogenide (TMdC) film has not been established to date. Here, we report the SC growth of TMdC monolayers in a centimeter scale via atomic sawtooth gold surface as a universal growth template. Atomic tooth-gullet surface is constructed by the one-step solidification of liquid gold, evidenced by transmission-electron-microscopy. Anisotropic adsorption energy of TMdC cluster, confirmed by density-functional calculations, prevails at the periodic atomic-step edge to yield unidirectional epitaxial growth of triangular TMdC grains, eventually forming the SC film, regardless of Miller indices. Growth using atomic sawtooth gold surface as a universal growth template is demonstrated for several TMdC monolayer films, including WS2, WSe2, MoS2, MoSe2/WSe2 heterostructure, and W1-xMoxS2 alloy. Our strategy provides a general avenue for the SC growth of diatomic van der Waals heterostructures in a wafer scale, to further facilitate the applications of TMdCs in post silicon technology.