论文标题
单晶/紧凑型金属氧化物气体传感层的电导模型在非分类限制中:外延SNO $ _2 $(101)的示例
Conductance Model for Single-Crystalline/Compact Metal Oxide Gas Sensing Layers in the Non-Degenerate Limit: Example of Epitaxial SnO$_2$(101)
论文作者
论文摘要
半导体金属氧化物(SMOX)的气体传感器对于安全和健康应用是必不可少的,例如爆炸性,有毒的气体警报,控制汽车舱的摄入量并监视工业过程。过去,传感器社区一直在研究多晶材料作为传感器,在这种传感器中,SMOX的多孔和随机微观结构不允许分离传感过程中涉及的现象。这导致了可以建模和预测整体响应行为的传导模型,但它们无法提供有关发生的基本机制的基本信息。外延层的研究是确定的,旨在阐明通过研究多晶样品无法做到的感应机制的不同方面和贡献。开发了N和P型单晶/紧凑型金属氧化物气体传感器的详细分析模型,该模型直接将样品的电导与表面静电电位变化联系起来。在操作条件下,在紧凑型SNO2(101)层中使用了合并的直流电阻和工作函数测量值,这使我们能够在Boltzmann近似值确定材料的表面和体积特性的区域中检查模型的有效性。
Semiconducting metal oxide (SMOX)-based gas sensors are indispensable for safety and health applications, e.g. explosive, toxic gas alarms, controls for intake into car cabins and monitor for industrial processes. In the past, the sensor community has been studying polycrystalline materials as sensors where the porous and random microstructure of the SMOX does not allow a separation of the phenomena involved in the sensing process. This lead to conduction models that can model and predict the behavior of the overall response, but they were not capable of giving fundamental information regarding the basic mechanisms taking place. The study of epitaxial layers is the definite prove to clarify the different aspects and contributions of the sensing mechanisms that are not possible to do by studying a polycrystalline sample. A detailed analytical model for n and p-type single-crystalline/compact metal oxide gas sensors was developed that directly relates the conductance of the sample with changes in the surface electrostatic potential. Combined DC resistance and work function measurements were used in a compact SnO2 (101) layer in operando conditions that allowed us to check the validity of our model in the region where Boltzmann approximation holds to determine surface and bulk properties of the material.