论文标题
无遗物的X射线纳米摄影量低至150nm分辨率:基于实验室的NTCT系统的调制转移和焦点
Lenseless X-ray Nano-Tomography down to 150nm Resolution: On the Quantification of Modulation Transfer and Focal Spot of the Lab-based ntCT System
论文作者
论文摘要
NTCT纳米断层扫描系统是一个几何放大X射线显微镜系统,该系统整合了最近的Excillum纳米管纳米对焦X射线源和CDTE光子计数从Dectris计数。系统的调制传输函数(MTF)和相应的点扩散函数(PSF)的特征是分析恒星图案的周期性结构的对比度,其符合线宽度从150nm到1.5 $μ$ m。结果可以归因于源点的特征,可以通过扫描源的电子焦点在结构化传输目标的边缘上进行交叉检查,以便获得其点扩散函数的独立测量。对于高于1000线台的频率/mm,发现MTF对应于最大最大宽度250nm的高斯PSF(FWHM)。较低的频率范围降至340个线条/mm,显示了1 $ m $ m fwhm的额外高斯贡献。所得的分辨率在3200行台上/mm处范围,这与成像恒星图案中最小的150nm结构的视觉可检测性一致。
The ntCT nano tomography system is a geometrically magnifying X-ray microscopy system integrating the recent Excillum NanoTube nano-focus X-ray source and a CdTe photon counting detector from Dectris. The system's modulation transfer function (MTF) and corresponding point spread function (PSF) are characterized by analyzing the contrast visibility of periodic structures of a star pattern featuring line width from 150nm to 1.5$μ$m. The results, which can be attributed to the characteristics of the source spot, are crosschecked by scanning the source's electron focus over an edge of the structured transmission target in order to obtain an independent measurement of its point spread function. For frequencies above 1000 linepairs/mm, the MTF is found to correspond to a Gaussian PSF of 250nm full width at half maximum (FWHM). The lower frequency range down to 340 linepairs/mm shows an additional Gaussian contribution of 1$μ$m FWHM. The resulting resolution ranges at 3200 linepairs/mm, which is consistent with the visual detectability of the smallest 150nm structures within the imaged star pattern.