论文标题
具有红色增强灵敏度和低时机抖动的Spad-array的定制硅技术
Custom silicon technology for SPAD-arrays with red-enhanced sensitivity and low timing jitter
论文作者
论文摘要
单光子检测是许多应用程序的宝贵工具，从基础研究到消费电子产品。在这方面，单个光子雪崩二极管（SPAD）由于其出色的性能，室温操作和可扩展性，在这些技术的广泛扩散中起着关键作用。在本文中，我们提出了一种硅技术，该技术允许使用低正时抖动（95 PS FWHM）的前所未有组合的Spad-arrays制造，红色和接近红外波长（在650 nm的峰值为70％，在800 Nm时为45％）。我们讨论设备结构，制造过程，并提出了制造检测器的彻底实验表征。我们认为这些期待已久的结果可以为许多领域的新令人兴奋的发展铺平道路，从量子光学到单分子光谱法
Single-photon detection is an invaluable tool for many applications ranging from basic research to consumer electronics. In this respect, the Single Photon Avalanche Diode (SPAD) plays a key role in enabling a broad diffusion of these techniques thanks to its remarkable performance, room-temperature operation, and scalability. In this paper we present a silicon technology that allows the fabrication of SPAD-arrays with an unprecedented combination of low timing jitter (95 ps FWHM) and high detection efficiency at red and near infrared wavelengths (peak of 70% at 650 nm, 45% at 800 nm). We discuss the device structure, the fabrication process, and we present a thorough experimental characterization of the fabricated detectors. We think that these long-awaited results can pave the way to new exciting developments in many fields, ranging from quantum optics to single molecule spectroscopy
