论文标题
用侧壁探针对探针质量和侧壁扩展的影响进行敲击模式AFM的动态分析
Dynamic analysis of tapping-mode AFM with sidewall probe subjected to effects of probe mass and sidewall extension
论文作者
论文摘要
带有侧壁（AFM SW）的原子力显微镜广泛用于侧面表面的纳米尺度表面测量。在当前的研究中，通过考虑侧壁束及其探针的影响，开发了一种分析方法来探索AFM-SW的动力学。广泛研究了探针质量，侧壁延伸长度和尖端样品相互作用对谐振频率和微型局体振幅的影响。所获得的分析模型的结果证明了这些参数对AFM-SW动力学的显着影响。为了验证分析模型的准确性，将获得的结果与先前发表的作品的仿真数据进行了比较，并观察到了良好的一致性。悬臂的共振频率（RF）显然会在考虑探针的质量时，尤其是在较高的RF中。此外，当侧壁梁更长时，对RF的探针效应更高。当尖端样本相互作用或探针质量较高时，共振频率会降低，但是当探针质量和相互作用在一起时，减少的量会增加。开发了一种分析方法来探索具有侧壁束效应（AFM-SW）的原子力显微镜的动力学。研究了探针质量，侧壁延伸长度和尖端样品相互作用对微型委托人振动的影响。将获得的结果与以前的文献进行了比较。结果表明，当考虑探测器的质量时，悬臂的共振频率（RF）会下降。此外，当侧壁梁更长时，对RF的探针效应更高。当尖端样本相互作用或探针质量较高时，共振频率会降低，但是当它们处于较高点时，降低的量会增加。
Atomic Force Microscopy with SideWall (AFM SW) is widely used for nano-scale surface measurements at side surfaces. In the current study, by taking into consideration the effects of sidewall beam and its probe, an analytical method is developed to explore the dynamics of AFM-SW. The effect of probe mass, sidewall extension length, and tip sample interactions on the resonance frequencies and amplitude of Micro-Cantilever is widely investigated. The obtained results of the analytical model demonstrate the significant effect of these parameters on the dynamics of AFM-SW. To verify the accuracy of the analytical model, the obtained results are compared against the simulation data of previously published works and a good agreement is observed. Resonance Frequency (RF) of cantilever clearly declines when the mass of probe is taken to account, especially in higher RFs. Besides, probe effect on RF is higher when sidewall beam is longer. Resonance frequency decreases when tip-sample interaction or probe mass is high, yet the amount of reduction is intensified when probe mass and interaction together are at higher point. An analytical method is developed to explore the dynamics of Atomic Force Microscopy with considering SideWall beam effects (AFM-SW). The effect of probe mass, sidewall extension length, and tip sample interactions on vibration of micro-cantilever is investigated. The obtained results are compared with previous literatures. The results show that Resonance Frequency (RF) of cantilever declines when the mass of probe is taken to account. Besides, probe effect on RF is higher when sidewall beam is longer. Resonance frequency decreases when tip-sample interaction or probe mass is high, yet the amount of reduction is intensified when they are at higher point.
