论文标题
可见光的集成雪崩光电视
Integrated Avalanche Photodetectors for Visible Light
论文作者
论文摘要
集成的光电探测器是用于量子和经典应用的可扩展光子平台的重要组成部分。但是，迄今为止，在此类设备开发方面的大多数努力都集中在红外电信波长上。在这里，我们报告了第一个单一集成的雪崩光电探测器（APD），用于可见光。我们的设备基于掺杂的硅肋波导，其新型末端输入耦合与氮化硅波导。我们证明了216 $ \ pm的高增益带宽产品在20 V反向偏置的685 nm输入光中测量，低黑暗电流为0.12 $μ$ a。当与在红外线范围内运行的其他集成的APD进行基准测试时，这种性能非常有竞争力。借助CMOS兼容的制造和与硝酸硅平台的集成性，我们的设备对感应和通信中的可见光光子应用具有吸引力。
Integrated photodetectors are essential components of scalable photonics platforms for quantum and classical applications. However, most efforts in the development of such devices to date have been focused on infrared telecommunications wavelengths. Here, we report the first monolithically integrated avalanche photodetector (APD) for visible light. Our devices are based on a doped silicon rib waveguide with a novel end-fire input coupling to a silicon nitride waveguide. We demonstrate a high gain-bandwidth product of 216 $\pm$ 12 GHz at 20 V reverse bias measured for 685 nm input light, with a low dark current of 0.12 $μ$A . This performance is very competitive when benchmarked against other integrated APDs operating in the infrared range. With CMOS-compatible fabrication and integrability with silicon nitride platforms, our devices are attractive for visible-light photonics applications in sensing and communications.
