论文标题
单独从扫描电子衍射测量中重建散射矩阵
Reconstructing the Scattering Matrix from Scanning Electron Diffraction Measurements Alone
论文作者
论文摘要
X射线和电子显微镜中乘散射样品的三维相对比成像非常具有挑战性，这是由于较小的数值孔径，波前塑料光学元件的不可用以及仅强度测量值所需的高度非线性倒置。在这项工作中，我们使用散射矩阵形式主义提出了一种新算法，从扫描衍射测量中从非晶介质中求解散射，并恢复照明畸变。我们的方法将在高分辨率上为多种材料提供3D成像和材料表征。
Three-dimensional phase contrast imaging of multiply-scattering samples in X-ray and electron microscopy is extremely challenging, due to small numerical apertures, the unavailability of wavefront shaping optics, and the highly nonlinear inversion required from intensity-only measurements. In this work, we present a new algorithm using the scattering matrix formalism to solve the scattering from a non-crystalline medium from scanning diffraction measurements, and recover the illumination aberrations. Our method will enable 3D imaging and materials characterization at high resolution for a wide range of materials.
