论文标题
使用四轮横向剪切干涉法使用元表面光学表征
Metasurface optical characterization using quadriwave lateral shearing interferometry
论文作者
论文摘要
光学元表面由散射纳米结构的密集且通常不均匀的层组成,表现为连续且极其薄的光学组件,具有预定义的相位和强度传输/反射曲线。迄今为止,已经引入了各种类型的元信息(金属,电介质,类似于Huygens,pancharatman-Berry等)来设计超薄镜头,梁偏转器,全息图或极化界面。它们的实际效率取决于预测其光学特性的能力和在宏观表面上制造数十亿纳米级结构的非均匀组装的能力。为了进一步帮助改善元信息的设计,需要开发精确和多功能的特定后技术。如今,用于表征元时间的大多数技术都取决于光强度测量。在这里,我们证明了四翼侧剪切干涉法(QLSI)是一种定量相显微镜技术,可以轻松地实现任何类型的跨膜的完整光学表征,因为它可以探测由高灵敏度和空间分辨率赋予的元素赋予的局部相。为了说明这种技术的多功能性,我们介绍了两种类型的元信息的测量值,即pancharatnam-berry和有效的反射 - 索引元信息,并在均匀的跨膜,金属镜,金属镜和偏转器上进行呈现结果。
An optical metasurface consists of a dense and usually non-uniform layer of scattering nanostructures behaving as a continuous and extremely thin optical component, with predefined phase and intensity transmission/reflection profiles. To date, various sorts of metasurfaces (metallic, dielectric, Huygens-like, Pancharatman-Berry, etc.) have been introduced to design ultrathin lenses, beam deflectors, holograms, or polarizing interfaces. Their actual efficiencies depend on the ability to predict their optical properties and to fabricate non-uniform assemblies of billions of nanoscale structures on macroscopic surfaces. To further help improve the design of metasurfaces, precise and versatile post-characterization techniques need to be developed. Today, most of the techniques used to characterize metasurfaces rely on light intensity measurements. Here, we demonstrate how quadriwave lateral shearing interferometry (QLSI), a quantitative phase microscopy technique, can easily achieve full optical characterization of metasurfaces of any kind, as it can probe the local phase imparted by a metasurface with high sensitivity and spatial resolution. As a means to illustrate the versatility of this technique, we present measurements on two types of metasurfaces, namely Pancharatnam-Berry and effective-refractive-index metasurfaces, and present results on uniform metasurfaces, metalenses and deflectors.