论文标题

确定无限薄板的板电阻,其五个点触点位于任意位置

Determination of the sheet resistance of an infinite thin plate with five point contacts located at arbitrary positions

论文作者

Szymański, Krzysztof R., Zaleski, Piotr A.

论文摘要

在本文中,报道了一种独立于探针位置的五探针测量方法。该方法对于无限均匀平面很严格。它具有基于平面分子层的板电阻标准的潜在应用。该方法可用于测量具有球形拓扑的物体覆盖物体的层电阻,尤其是在微观和纳米尺度上,在那里很难控制探针定位。

In this paper, a five-probe method of sheet resistance measurement that is independent of probe positions is reported. The method is strict for an infinite homogeneous plane. It has potential applications as a sheet resistance standard based on planar molecular layers. The method can be used to measure the sheet resistance of layers covering objects with a spherical topology, particularly on micro- and nanometric scales, where it is difficult to control probe positioning.

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