论文标题
独立式氮化硅纳米梁，具有有效的纤维芯片界面，用于腔
Free-standing silicon nitride nanobeams with efficient fiber-chip interface for cavity QED
论文作者
论文摘要
我们介绍了高质量因子氮化液纳米孔PHC腔的设计，制造和表征，可在可见的波长处使用，以耦合到空腔QED系统中的钻石颜色中心。我们演示了质量质量为24; 000的设备，围绕钻石的锗视口中心零孔线。我们还提出了一个有效的纤维到波导耦合平台，用于悬浮的纳米光子学。通过轻轻更改纤维波导界面处的相应有效指数，我们在空腔共振下达到约96％的效率。
We present the design, fabrication and characterization of high quality factor silicon nitride nanobeam PhC cavities at visible wavelengths for coupling to diamond color centers in a cavity QED system. We demonstrate devices with a quality factor of about 24;000 around the zero-phonon line of the germanium-vacancy center in diamond. We also present an efficient fiber-to-waveguide coupling platform for suspended nanophotonics. By gently changing the corresponding effective indices at the fiber-waveguide interface, we achieve an efficiency of about 96% at the cavity resonance.
