论文标题
基于膜的扫描力显微镜
Membrane-based scanning force microscopy
论文作者
论文摘要
我们报告了基于超敏感的氮化硅膜传感器的扫描力显微镜的发展。通过反转标准显微镜几何形状,我们的发展成为可能 - 在我们的仪器中,底物是振动的,扫描尖端处于静止状态。我们介绍放置在膜表面上的样品的第一个地形图像。我们的测量结果表明,膜在装有样品并在扫描尖端的情况下保留了出色的力灵敏度。我们将仪器作为量子限制的力传感器和成像工具的前景和局限性讨论。
We report the development of a scanning force microscope based on an ultra-sensitive silicon nitride membrane transducer. Our development is made possible by inverting the standard microscope geometry - in our instrument, the substrate is vibrating and the scanning tip is at rest. We present first topography images of samples placed on the membrane surface. Our measurements demonstrate that the membrane retains an excellent force sensitivity when loaded with samples and in the presence of a scanning tip. We discuss the prospects and limitations of our instrument as a quantum-limited force sensor and imaging tool.