论文标题

不同的表面形态对高压,低电阻钻石schottky二极管性能的影响

Influence of Different Surface Morphologies on the Performance of High Voltage, Low Resistance Diamond Schottky Diodes

论文作者

Reinke, Philipp, Benkhelifa, Fouad, Kirste, Lutz, Czap, Heiko, Pinti, Lucas, Zürbig, Verena, Cimalla, Volker, Nebel, Christoph, Ambacher, Oliver

论文摘要

垂直钻石schottky二极管带有阻塞电压$ v _ {\ text {bd}}> 2.4 \ text {kv} $和en-抗性$ r _ {\ text {on}}} <400 \ 400 \ text {m}形态。形态(光滑,山丘丰富,抛光)会影响肖特基屏障,载体运输特性,因此会影响设备性能。光滑的样本表现出低反向电流密度$ j _ {\ text {rev}} <10^{ - 4} \ text {a}/\ text {a}/\ text {cm}^{2} $,用于反向伏特,最高$ 2.2 \ text {kv} $。富含丘陵的样品阻止了相似的电压,反向电流密度略有增加($ j _ {\ text {rev}} <10^{ - 3} \ text {a}/\ text {a}/\ text {cm}^{2} $)。但是,计算出的1D损坏字段减少了$ 30 \ text {} \%$,表明由不均匀表面引起的字段增强。抛光的样品显示出与光滑的样品相似的击穿电压和反向电流密度,这表明抛光表面可以适合设备制造。但是,对每个样品的几个二极管的统计分析表明了底物质量的重要性:高密度的缺陷既可以降低可行的设备区域并增加反向电流密度。在向前的方向上,富含小丘的样品表现出次要的Schottky屏障,可以配备使用Lambert W功能的改良热发射模型。抛光和平滑样品均显示出几乎理想的热发射排放,理想因素分别为$ 1.08 $和$ 1.03 $。与文献相比,所有三个二极管都表现出具有$ v _ {\ text {bd}}> 2 \ 2 \ text {kv} $的钻石Schottky二极管的优点。

Vertical diamond Schottky diodes with blocking voltages $V_{\text{BD}} > 2.4 \text{ kV}$ and on-resistances $R_{\text{On}} < 400 \text{ m}Ω\text{cm}^{2}$ were fabricated on homoepitaxially grown diamond layers with different surface morphologies. The morphology (smooth as-grown, hillock-rich, polished) influences the Schottky barrier, the carrier transport properties, and consequently the device performance. The smooth as-grown sample exhibited a low reverse current density $J_{\text{Rev}} < 10^{-4} \text{ A}/\text{cm}^{2}$ for reverse voltages up to $2.2 \text{ kV}$. The hillock-rich sample blocked similar voltages with a slight increase in the reverse current density ($J_{\text{Rev}} < 10^{-3} \text{ A}/\text{cm}^{2}$). The calculated 1D-breakdown field, however, was reduced by $30 \text{ } \%$, indicating a field enhancement induced by the inhomogeneous surface. The polished sample demonstrated a similar breakdown voltage and reverse current density as the smooth as-grown sample, suggesting that a polished surface can be suitable for device fabrication. However, a statistical analysis of several diodes of each sample showed the importance of the substrate quality: A high density of defects both reduces the feasible device area and increases the reverse current density. In forward direction, the hillock-rich sample exhibited a secondary Schottky barrier, which could be fitted with a modified thermionic emission model employing the Lambert W-function. Both polished and smooth sample showed nearly ideal thermionic emission with ideality factors $1.08$ and $1.03$, respectively. Compared with literature, all three diodes exhibit an improved Baliga Figure of Merit for diamond Schottky diodes with $V_{\text{BD}} > 2 \text{ kV}$.

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