论文标题
不同的表面形态对高压,低电阻钻石schottky二极管性能的影响
Influence of Different Surface Morphologies on the Performance of High Voltage, Low Resistance Diamond Schottky Diodes
论文作者
论文摘要
垂直钻石schottky二极管带有阻塞电压$ v _ {\ text {bd}}> 2.4 \ text {kv} $和en-抗性$ r _ {\ text {on}}} <400 \ 400 \ text {m}形态。形态(光滑,山丘丰富,抛光)会影响肖特基屏障,载体运输特性,因此会影响设备性能。光滑的样本表现出低反向电流密度$ j _ {\ text {rev}} <10^{ - 4} \ text {a}/\ text {a}/\ text {cm}^{2} $,用于反向伏特,最高$ 2.2 \ text {kv} $。富含丘陵的样品阻止了相似的电压,反向电流密度略有增加($ j _ {\ text {rev}} <10^{ - 3} \ text {a}/\ text {a}/\ text {cm}^{2} $)。但是,计算出的1D损坏字段减少了$ 30 \ text {} \%$,表明由不均匀表面引起的字段增强。抛光的样品显示出与光滑的样品相似的击穿电压和反向电流密度,这表明抛光表面可以适合设备制造。但是,对每个样品的几个二极管的统计分析表明了底物质量的重要性:高密度的缺陷既可以降低可行的设备区域并增加反向电流密度。在向前的方向上,富含小丘的样品表现出次要的Schottky屏障,可以配备使用Lambert W功能的改良热发射模型。抛光和平滑样品均显示出几乎理想的热发射排放,理想因素分别为$ 1.08 $和$ 1.03 $。与文献相比,所有三个二极管都表现出具有$ v _ {\ text {bd}}> 2 \ 2 \ text {kv} $的钻石Schottky二极管的优点。
Vertical diamond Schottky diodes with blocking voltages $V_{\text{BD}} > 2.4 \text{ kV}$ and on-resistances $R_{\text{On}} < 400 \text{ m}Ω\text{cm}^{2}$ were fabricated on homoepitaxially grown diamond layers with different surface morphologies. The morphology (smooth as-grown, hillock-rich, polished) influences the Schottky barrier, the carrier transport properties, and consequently the device performance. The smooth as-grown sample exhibited a low reverse current density $J_{\text{Rev}} < 10^{-4} \text{ A}/\text{cm}^{2}$ for reverse voltages up to $2.2 \text{ kV}$. The hillock-rich sample blocked similar voltages with a slight increase in the reverse current density ($J_{\text{Rev}} < 10^{-3} \text{ A}/\text{cm}^{2}$). The calculated 1D-breakdown field, however, was reduced by $30 \text{ } \%$, indicating a field enhancement induced by the inhomogeneous surface. The polished sample demonstrated a similar breakdown voltage and reverse current density as the smooth as-grown sample, suggesting that a polished surface can be suitable for device fabrication. However, a statistical analysis of several diodes of each sample showed the importance of the substrate quality: A high density of defects both reduces the feasible device area and increases the reverse current density. In forward direction, the hillock-rich sample exhibited a secondary Schottky barrier, which could be fitted with a modified thermionic emission model employing the Lambert W-function. Both polished and smooth sample showed nearly ideal thermionic emission with ideality factors $1.08$ and $1.03$, respectively. Compared with literature, all three diodes exhibit an improved Baliga Figure of Merit for diamond Schottky diodes with $V_{\text{BD}} > 2 \text{ kV}$.