论文标题
通过像素化检测器获得的二元非晶体材料的扫描收敛梁电子衍射，局部厚度和组成测量值
Local thickness and composition measurements from scanning convergent-beam electron diffraction of a binary non-crystalline material obtained by a pixelated detector
论文作者
论文摘要
我们从衍射中测量了基于SIO2的玻璃材料的局部组成和厚度。通过使用四维扫描透射电子显微镜（4D-STEM），我们在每个扫描点获得了衍射。将获得的衍射与模拟衍射模式进行比较，我们尝试测量局部组成和厚度。尽管此方法需要一些约束，但该方法用1/10或更少的电子剂量测量了局部组成和厚度。
We measured the local composition and thickness of SiO2-based glass material from diffraction. By using four dimensional scanning transmission electron microscopy (4D-STEM), we obtained diffraction at each scanning point. Comparing the obtained diffraction with simulated diffraction patterns, we try to measure the local composition and thickness. Although this method requires some constraints, this method measured local composition and thickness with 1/10 or less electron dose of EELS.
