论文标题
基于直方图的自动分割：一种从SEM图像分割集成电路结构的新方法
Histogram-based Auto Segmentation: A Novel Approach to Segmenting Integrated Circuit Structures from SEM Images
论文作者
论文摘要
在反向工程和硬件保证域中，大多数数据采集都是通过电子显微镜技术（例如扫描电子显微镜（SEM））完成的。但是，与光学成像中的对应物不同，只有有限数量的技术可以从原始SEM图像中增强和提取信息。在本文中，我们引入了一种算法，以从SEM图像中划分集成电路（IC）结构。与本文中讨论的现有算法不同，该算法是无监督的，不含参数的，并且不需要有关噪声模型或目标图像中特征的事先信息，从而使其在低质量的图像采集方案中也有效。此外，报告并讨论了算法在IC中各种结构和层上应用的结果。
In the Reverse Engineering and Hardware Assurance domain, a majority of the data acquisition is done through electron microscopy techniques such as Scanning Electron Microscopy (SEM). However, unlike its counterparts in optical imaging, only a limited number of techniques are available to enhance and extract information from the raw SEM images. In this paper, we introduce an algorithm to segment out Integrated Circuit (IC) structures from the SEM image. Unlike existing algorithms discussed in this paper, this algorithm is unsupervised, parameter-free and does not require prior information on the noise model or features in the target image making it effective in low quality image acquisition scenarios as well. Furthermore, the results from the application of the algorithm on various structures and layers in the IC are reported and discussed.
