论文标题
胶体光刻与钙钛矿纳米晶体制造的金属膜中的纳米和微观孔径
Nano- and microscale apertures in metal films fabricated by colloidal lithography with perovskite nanocrystals
论文作者
论文摘要
我们基于钙钛矿纳米晶体的升降来展示金属表面的图案，该纳米晶体可以制造纳米尺寸的特征，而无需使用基于抗性的纳米光刻。钙钛矿纳米晶体充当定义金属层中孔的形状的模板，我们利用可以在胶体合成中控制的各种尺寸和形状的种类，以证明纳米霍尔斯，纳米胶囊，纳米胶质和指南的制造，其大小比可见光的光线尺寸小。该过程可以很容易地与标准光刻和蚀刻技术集成，以创建更复杂的结构。
We demonstrate patterning of metal surfaces based on lift-off of perovskite nanocrystals that enables the fabrication of nanometer-size features without the use of resist-based nanolithography. The perovskite nanocrystals act as templates for defining the shape of the apertures in metal layers, and we exploit the variety of sizes and shapes that can be controlled in the colloidal synthesis to demonstrate the fabrication of nanoholes, nanogaps and guides with size smaller than the wavelength of light in the visible spectrum. The process can be readily integrated with standard lithography and etching techniques for the creation of more complex structures.
