论文标题
Hafnium Orthosilicate的物理和机械性能:实验和第一原理计算
The physical and mechanical properties of hafnium orthosilicate: experiments and first-principles calculations
论文作者
论文摘要
已经提出了Hafnium Orthosilicate(HFSIO4:HAFNON)作为环境屏障涂层(EBC)材料,以保护高温下的硅涂层,基于硅的陶瓷材料,并作为微电动设备中的候选介电材料。它可以自然形成二氧化硅(SiO2)和Hafnia(HFO2)之间的界面。当在这些应用中使用时,其热膨胀系数(CTE)应与硅和SIC复合材料相匹配,以减少存储的弹性应变能,从而减少这些系统故障的风险。使用密度功能理论(DFT)计算和实验评估的结合,已经研究了HAFNON的物理,机械,热力学和热运输特性。随着温度从300 K的增加,使用准谐波近似计算的热膨胀(CTE)的平均线性系数从3.06 10-6 k-1增加到6.36 10-6 k-1,这与X射线衍射晶格参数和扩张量测量值均一致。 Boltzmann运输理论的预测导热率在300K时约为18 W/M.K。热盘和激光闪光测量值的导热率为13.3 w/m.k。这种略低的值表明在实验样品中,在理论分析中不存在残留障碍。第一原理的计算和纳米识别技术分别用于评估环境弹性常数和大量模量。两种方法获得的弹性特性都同意在5%之内验证计算方法及其对研究其他氧化物或硅酸盐热力学特性的未来使用。
Hafnium orthosilicate (HfSiO4: hafnon) has been proposed as an environmental barrier coating (EBC) material to protect silicon coated, silicon-based ceramic materials at high temperatures and as a candidate dielectric material in microelectronic devices. It can naturally form at the interface between silicon dioxide (SiO2) and hafnia (HfO2). When used in these applications, its coefficient of thermal expansion (CTE) should match that of silicon and SiC composites to reduce the stored elastic strain energy, and thus risk of failure of these systems. The physical, mechanical, thermodynamic and thermal transport properties of hafnon have been investigated using a combination of both density functional theory (DFT) calculations and experimental assessments. The average linear coefficient of thermal expansion (CTE) calculated using the quasi-harmonic approximation increase from 3.06 10-6 K-1 to 6.36 10-6 K-1, as the temperature increases from 300 to 1500 K, in agreement with both X-ray diffraction lattice parameter and dilatometry measurements. The predicted thermal conductivity from Boltzmann transport theory was approximately 18 W/m.K at 300K. Both hot disk and laser flash measurements gave a thermal conductivity of 13.3 W/m.K. This slightly lower value is indicative of residual disorder in the experimental samples that was absent in the theoretical analysis. First-principles calculations and nanoindentation techniques were used to assess the ambient temperature elastic constants and bulk modulus respectively. The elastic properties obtained by both approaches agreed to within 5% validating the computational approach and its future use for study of the thermomechanical properties of other oxides or silicates.