论文标题
使用能量充电景观分析静电膜
Analysis of Electrostatic MEMS Using Energy-Charge Landscape
论文作者
论文摘要
分析静电微电动系统（MEMS）执行器的一种常见方法是使用其能量置换景观。在这里，我们描述了一种使用其能量电荷景观来分析静电MEMS致动器的替代方法。该技术涉及从位移到电荷的坐标转换，从而在电荷方面制定了静电MEMS执行器的哈密顿量。我们研究了能量电荷景观的使用来分析静态引进，动态引进和引进现象。使用此方法得出的电压表达式与使用常规能量置换景观得出的电压表达式相同。此外，我们还获得了在静态和动态引进条件下电荷的表达式。这项工作可以帮助设计和分析静电MEMS设备。作为一个案例研究，对反馈电容器MEMS执行器系统的分析进行了说明，以说明能量充电景观的应用。
A common way to analyze electrostatic microelectromechanical systems (MEMS) actuators is to use their energy-displacement landscape. Here, we describe an alternative approach to analyze electrostatic MEMS actuators using their energy-charge landscape. This technique involves coordinate transformation from displacement to charge, thereby formulating the Hamiltonian of electrostatic MEMS actuators in terms of charge. We investigate the use of the energy-charge landscape to analyze static pull-in, dynamic pull-in, and pull-out phenomena. The voltage expressions derived using this method are identical with those derived using the conventional energy-displacement landscape. In addition, we also obtain the expressions for charge under static and dynamic pull-in conditions. This work can aid in the design and analysis of electrostatic MEMS devices. As a case study, the analysis of a feedback capacitor-MEMS actuator system is presented to illustrate the application of the energy-charge landscape.
