论文标题
相关和原位电气传输电子显微镜研究以及相关的膜制造
Correlated and in-situ electrical transmission electron microscopy studies and related membrane fabrication
论文作者
论文摘要
了解半导体纳米对象的结构,组成和光电特性之间的相互作用需要将基于透射电子显微镜(TEM)技术与相同标本上的电气和光学测量相结合。 TEM技术的最新发展不仅允许对特定物体的识别和原位电气表征,还允许通过焦耳加热等技术直接可视化其对原位的可视化。在过去的几年中,我们在这些领域进行了许多研究,这些研究在此贡献中进行了审查。特别是,我们在这里讨论i)相关的研究,其中相同的独特物体是通过电气方式表征的,而tem,ii)原位焦耳加热研究,其中在TEM中监测了固态金属 - 核导体反应,以及III)坐姿偏置研究,以更好地理解接触的单位纳维利亚的电气特性。此外,我们还为这些相关和原位测量至关重要的氮化硅膜提供了详细的制造步骤。
Understanding the interplay between the structure, composition and opto-electronic properties of semiconductor nano-objects requires combining transmission electron microscopy (TEM) based techniques with electrical and optical measurements on the very same specimen. Recent developments in TEM technologies allow not only the identification and in-situ electrical characterization of a particular object, but also the direct visualization of its modification in-situ by techniques such as Joule heating. Over the past years, we have carried out a number of studies in these fields that are reviewed in this contribution. In particular, we discuss here i) correlated studies where the same unique object is characterized electro-optically and by TEM, ii) in-situ Joule heating studies where a solid-state metal-semiconductor reaction is monitored in the TEM, and iii) in-situ biasing studies to better understand the electrical properties of contacted single nanowires. In addition, we provide detailed fabrication steps for the silicon nitride membranes crucial to these correlated and in-situ measurements.