论文标题
由Ponderomotive电流驱动的电感耦合等离子体中的参数不稳定性
The parametric instability in the inductively coupled plasma driven by the ponderomotive current
论文作者
论文摘要
当射频波中的电子Quiver速度的顺序大于或大于电子热速度时，电感放电的皮肤层血浆的稳定性理论是为了开发出的。该理论基于振荡模式的方法，该方法解释了电子成分的振荡运动相对于皮肤层的空间不均匀RF场中不可移动的离子。该理论预测了皮肤层中参数类型的不稳定性，其增长率与频率相当。这种不稳定性源于射频场中电子离子相对运动引起的两种作用的耦合作用：扰动电势的谐波的发生及其由于浮子电流引起的耦合。不稳定性存在于浮动电流速度的有限间隔中，在均匀的无限等离子体中不存在。
The stability theory of the skin layer plasma of the inductive discharge is developed for the case when the electron quiver velocity in RF wave is of the order of or is larger than the electron thermal velocity. This theory is grounded on the methodology of the oscillating modes, which accounts for the oscillation motion of the electron component relative to the unmovable ions in the spatially inhomogeneous RF field of the skin layer. The theory predicts the existence the instability of the parametric type in a skin layer with the growth rate comparable with frequency. This instability stems from the coupled action of two effects caused by the electron-ion relative motion in RF field: occurrence of harmonics of the perturbed potential and their coupling due to the ponderomotive current. The instability exists in the finite interval of the ponderomotive current velocity and is absent in the uniform boundless plasma.
