ISO INTERNATIONAL STANDARD 25178-604 First edition 2013-08-01 Geometrical product specifications (GPS) Surface texture: Areal - Part 604: Nominal characteristics of non- contact (coherence scanning interferometry) instruments Spécification géométrique des produits (GPS) - Etat de surface: Surfacique Accessed by UNSW - LIBRARY on 15 Jun 2016 (Document currency not guaranteed when printed) Partie 604: Caractéristiques nominales des instruments sans contact (a interférométrie par balayage a cohérence) Reference number IS0 25178-604:2013(E) TSO @ IS0 2013 IS025178-604:2013(E) COPYRIGHTPROTECTEDDOCUMENT @ISO2013 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56 : CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland ii @ IS0 2013 - All rights reserved IS0 25178-604:2013(E) Contents Page Foreword ..iv Introduction. ..V Scope. .1 2 Terms and definitions .1 2.1 Terms and definitions related to all areal surface texture measurement methods 1 2.2 Terms and definitions related to x- and y-scanning systems. .6 2.3 Terms and definitions related to optical systems .8 2.4 Terms and definitions related to optical properties of the workpiece .10 2.5 Terms and definitions specific to coherence scanning interferometric microscopy ..10 3 Descriptions of the influence quantities .14 3.1 General ..14 3.2 Influence quantities. ..14 Annex A (informative) Overview and components of a coherence scanning interferometry (CSI) microscope. .17 Annex B (informative) Coherence scanning interferometry (csl) theory of operation ..22 Annex C (informative) Spatial resolution ..31 Annex D (informative) Example procedure for estimating surface topography repeatability ...36 Annex E (informative) Relation to the GPS matrix model ..37 Bibliography .39 Accessed by UNSW - LIBRARY on 15 Jun 2016 (Document currency not guaranteed when printed) @ IS0 2013 - All rights reserved iii