ISO INTERNATIONAL STANDARD 22493 Secondedition 2014-04-15 Microbeam analysis - Scanning electron microscopy Vocabulary Analyse par microfaisceaux - Microscopie électronique a balayage Vocabulaire Reference number IS0 22493:2014(E) LSO IS02014 IHS under ted without license from IHS Not for Resale IS0 22493:2014(E) COPYRIGHTPROTECTEDDOCUMENT @ IS0 2014 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56:CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ IS0 2014 - All rights reserved No reproductic networking permited without license from IHS Not for Resale IS0 22493:2014(E) Contents Page Foreword ..iv Introduction. ..V 1 Scope. ..1 2 Abbreviatedterms 3 Terms and definitions used in the physical basis of SEM 4 Terms and definitions used in SEM instrumentation 5 Terms and definitions used in SEM image formation and processing. ..12 6 Terms and definitions used in SEM image interpretation and analysis ..16 7 Terms and definitions used in the measurement and calibration of SEM image magnification and resolution. ..18 Bibliography .20 iii nse with IS thout license from IHS Not for Resale